Fabrication of Al-doped transparent conducting ZnO film on COP substrates by PLD method

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Department of Electronics, Information and Communication Engineering, College of Engineering, Osaka Sangyo University, 3-1-1 Nakagaito, Daito, Osaka 574-8530, Japan [1 ]
不详 [2 ]
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来源：
J.Vac. Soc.Japan | 2008年 / 3卷 / 178-181期
关键词：
Pulsed laser deposition;
D O I：
10.3131/jvsj2.51.178
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