Transmission lines embedded in silicon oxide layers on silicon wafers

被引：0
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作者：
Sun, Longjie [1 ,2 ]
Yang, Bo [2 ]
Guo, Lihui [2 ]
机构：
[1] Microelectronics Institute, Xidian University, Xi'an 710071, China
[2] Microelectronics Institute, Xi'an University of Science and Technology, Xi'an 710075, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2006年 / 27卷 / 01期
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页码：168 / 173
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