Improved fabrication process for monolithic integrated high-Tc dc superconducting quantum interference devices

被引：0

作者：

Ishimaru, Yoshihiro ^{[1
]}

Tarutani, Yoshinobu ^{[1
]}

Horibe, Osami ^{[1
]}

Oshirubo, Yasuo ^{[1
]}

Tanabe, Keiichi ^{[1
]}

机构：

[1] Superconductivity Research Laboratory, International Superconductivity Technology Center, 1-10-13 Shinonome, Koto-ku, Tokyo 135-0062, Japan

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 2007年 / 46卷 / 25-28期

关键词：

We have developed a new fabrication process for monolithic integrated high-Jo de superconducting quantum interference devices (SQUIDs) that enables us to prevent a degradation of the junction Tc. In the new process; bicrystal junctions are fabricated simultaneously with a flux transformer by using the top superconducting layer. The junctions in YBa2Cu 3O7-xbased SQUIDs fabricated by this process exhibited a Tc of approximately 85 K; indicating no significant degradation. In contrast; conventional monolithic SQUIDs where junctions are fabricated by using the base superconducting layer showed a junction rc typically below 65 K. A fabricated monolithic dc SQUID magnetometer with a 500 um square washer; a 23-turn 5-um-wide input coil; and a pickup loop 6 × 7 mm2 in outer dimension showed an effective area of 1.2 mm2 and an I c.Rn of 180 μuV at 77K. © 2007 The Japan Society of Applied Physics;

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Journal article (JA)

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