Research on annealing process and properties of Al-doped ZnO films

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作者：
Jiang, Min-Hong [1 ,2 ]
Liu, Xin-Yu [1 ,2 ]
机构：
[1] Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin 541004, China
[2] College of Material Science and Engineering, Central South University, Changsha 410083, China
来源：
Cailiao Rechuli Xuebao/Transactions of Materials and Heat Treatment | 2009年 / 30卷 / 02期
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页码：53 / 56
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