Extreme ultraviolet and visible emission spectroscopic characterization of CO2 laser produced tin plasma for lithography

被引：0
|
作者：
Wu, Tao [1 ,2 ]
Wang, Xinbing [1 ]
Tang, Jian [1 ]
Wang, Shaoyi [1 ]
Rao, Zhiming [1 ]
Yang, Chenguang [1 ]
Lu, Hong [1 ]
机构：
[1] Wuhan National Laboratory for Optoelectronics, School of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei 430074, China
[2] School of Science, Wuhan Institute of Technology, Wuhan, Hubei 430074, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2012年 / 32卷 / 04期
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D O I：
10.3788/AOS201232.0430002
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学科分类号：
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