Theoretical study on the dependence of acid distribution on material properties of chemically amplified extreme ultraviolet resists

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Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 8 PART 1卷 / 6288-6292期
关键词：
Acid generation efficiency - Chemically amplified - Chemically Amplified Resist - Extreme Ultraviolet - Extreme ultraviolet radiations - Reaction radius - Thermalization distance - Trade-off relationship;
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