The development of a 3-dimensional vibration measuring system with corner cubes and quadrant detectors

被引：0
|
作者：
Chen, Shang-Liang [1 ]
Jywe, Wen-Yuh [2 ,3 ]
Hsieh, Tung-Hsien [1 ]
Liu, Chien-Hung [4 ]
Huang, Hsueh-Liang [5 ]
Hsu, Tung-Hui [6 ]
Jeng, Yeau-Ren [6 ]
Wang, Ming-Shi [5 ]
机构：
[1] Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan 701, Taiwan
[2] Institute of Mechanical and ElectroMechanical Engineering, National Formosa University, Yunlin 632, Taiwan
[3] Instrument Technology Research Center, Nataional Applied Research Laboratories, Taiwan
[4] Graduate Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 632, Taiwan
[5] Department of Engineering Science, National Cheng-Kung University, Tainan 701, Taiwan
[6] Department of Mechanical Engineering, National Chung-Cheng University, Chiayi 621, Taiwan
来源：
Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A | 2010年 / 33卷 / 01期
关键词：
Edge detection;
D O I：
暂无
中图分类号：
O1 [数学];
学科分类号：
0701 ; 070101 ;
摘要：
In this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.
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页码：71 / 80
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