Anti-stiction coatings for MEMS switches based on quantitative evaluation of adhesion forces

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机构：
[1] [1,Yamashita, Takahiro
[2] Itoh, Toshihiro
[3] Suga, Tadatomo
来源：
| 1600年 / Japan Institute of Electronics Packaging卷 / 15期
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38;
D O I：
10.5104/jiep.15.49
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