High-temperature oxidation resistance of sputtered (Al,Cr,Nb,Ta,Ti,Si)N coatings

High-entropy metal-sublattice (Al,Cr,Nb,Ta,Ti)N coatings, with up to 15.0 at% additional Si content were developed and investigated for their oxidation resistance by exposing them for 3, 30, and 100 h to ambient air at 900, 950, and 1000 ∘C. The Si-free coating is rapidly oxidized, but all of the Si-alloyed coatings survive even the harshest oxidation test. The oxides crystallize mostly in the rutile structure with some Ta2O5-type phase fractions at higher Si contents. Detailed TEM investigations reveal a varied microstructure across the oxide scales with a succession of Cr-, Al, and Ti-rich top oxide layers, which agrees with a reported thermodynamical calculation of oxide stabilities. © 2024 The Authors