Probe and optical emission spectroscopy measurement of slotted antenna-excited nitrogen discharge plasma

被引:0
|
作者
Toyoyoshi, Reo [1 ]
Sakamoto, Takeshi [1 ]
Matsuura, Haruaki [1 ]
Akatsuka, Hiroshi [1 ]
机构
[1] Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology, 2-12-1-N1-10 O-Okayama, Meguro-ku, Tokyo 152-8550, Japan
关键词
Plasmas;
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摘要
Journal article (JA)
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页码:3566 / 3572
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