Surface roughness of various diamond-like carbon films

被引：8
|
作者：
School of Mathematics and Physics, Dalian Nationalities University, Dalian 116600, China [1 ]
不详 [2 ]
机构：
来源：
Plasma Sci. Technol. | 2006年 / 6卷 / 701-707期
关键词：
44;
D O I：
10.1088/1009-0630/8/6/17
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