Design, fabrication and characterization of a sheet-beam 140 GHz folded waveguide based on multi-step SU-8 UV-LIGA

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作者：
School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China [1 ]
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来源：
Qiangjiguang Yu Lizishu | / 8卷
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Compendex;
D O I：
10.11884/HPLPB201327.083101
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摘要：
Micromachining
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