Minimising environmental impact with intelligent vacuum solutions and abatement

The environmental impact of semiconductor manufacturing processes can be minimized by using vacuum pumps, which removes gases and by-products from the process chamber. The vacuum and abatement solutions must be fully integrated from the process chamber to the environment, customized for specific process, and optimized across all relevant economic, performance and environmental variables. Vacuum stage port and rotor profiles and the number of pumping stages cam be optimized for specific compression and pumping performance profiles. The distribution of the vacuum pumping system can provide significant improvements in overall vacuum performance. Combustion abatement systems must be customized to the abated process to optimize energy consumption and to avoid the unintentional creation of noxious compounds in the combustion process. Centralized energy management facilities designed into the system can tune component operations to optimize energy efficiency under varying process conditions.