Alignment and micro-displace measurement with four-quadrant photo-detector by system modeling

被引:1
|
作者
Tang, Xiaojun [1 ]
Li, Yujun [1 ,2 ]
Liu, Junhua [1 ]
Liang, Kun [3 ]
机构
[1] School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China
[2] School of Automation and Information Engineering, Xi'an University of Technology, Xi'an 710048, China
[3] School of Computer Science and Engineering, Xi'an University of Technology, Xi'an 710048, China
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D O I
10.3788/CJL20093603.0746
中图分类号
学科分类号
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页码:746 / 751
相关论文
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