Mechanical properties of nano-structured Ti-Si-N films synthesized by cathodic arc evaporation

被引：0
|
作者：
Yang, Sheng-Min [1 ]
Chang, Yin-Yu [2 ]
Wang, Da-Yung [2 ]
Lin, Dong-Yih [3 ]
Wu, WeiTe [1 ]
机构：
[1] Department of Materials Engineering, National Chung Hsing University, Taiwan
[2] Institute of Materials and System Engineering, MingDao University, Taiwan
[3] Department of Materials Science and Engineering, I-Shou University, Taiwan
来源：
Journal of Alloys and Compounds | 2007年 / 440卷 / 1-2期
关键词：
38;
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摘要：
Journal article (JA)
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页码：375 / 379
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