Time-optimal algorithms for continuous scans of wafer stage of step-scan lithography tool

被引：1
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作者：
School of Mechanical Science and Engineering, Huazhong Univ. of Sci. and Technol., Wuhan 430074, China [1 ]
不详 [2 ]
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来源：
Jixie Gongcheng Xuebao | 2008年 / 10卷 / 154-161期
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Scanning;
D O I：
10.3901/JME.2008.10.154
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