XRF for film thickness measurement: Pros vs. cons of common configurations. Choosing a benchtop or a hand-held X-ray fluorescence machine often boils down to user's specific needs.
作者:
Matrix Metrologies, Inc., Holbrook, NY, United States
Matrix Metrologies, Inc., Holbrook, NY, United States
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D O I:
10.1016/S0026-0576(06)80360-0