Non-contact deformable mirror actuator for spherical aberration compensation

被引:0
|
作者
Hashizume, Jiro [1 ]
Ide, Tatsuro [2 ]
Kanamaru, Masatoshi [1 ]
Mukoh, Masaki [2 ]
Watanabe, Koichi [2 ]
Yamauchi, Yoshiaki [1 ]
机构
[1] Mechanical Engineering Research Laboratory, Hitachi, Ltd., Hitachinaka, Ibaraki 312-0034, Japan
[2] Central Research Laboratory, Hitachi, Ltd., Kokubunnji, Tokyo 185-8601, Japan
关键词
Compendex;
D O I
09MA02
中图分类号
学科分类号
摘要
Mirrors
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