Preparation of transparent conducting ZnO:Zr films deposited by DC reactive magnetron sputtering

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[1] Zhang, Hua-Fu
[2] Lei, Cheng-Xin
[3] Liu, Han-Fa
[4] Yuan, Chang-Kun
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Zhang, H.-F. (huafuzhang@126.com) | 2012年 / Chinese Ceramic Society, Baiwanzhuang, Beijing, 100831, China卷 / 41期
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