Effects of CO2 laser pretreatment parameters on surface roughness of fused silica

被引：0

作者：

Wang H. ^{[1
]}

Li X. ^{[1
]}

Lü H. ^{[1
]}

Yuan X. ^{[1
]}

Zheng W. ^{[1
]}

机构：

[1] Research Center of Laser Fusion, CAEP, Mianyang 621900

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2010年 / 22卷 / 05期

关键词：

CO[!sub]2[!/sub] laser pretreatment; Duration; Duty cycle; Fused silica; Surface roughness;

D O I：

10.3788/HPLPB20102205.1031

中图分类号：

学科分类号：

摘要：

In order to study the effects of CO2 laser pretreatment parameters on surface roughness of fused silica, the fused silica samples were irradiated by a 100 Hz CO2 laser with a spot size of 1 mm2. Repairing degrees were defined as mild, moderate and severe. Surface roughnesses under different repairing degrees were satistically studied. Besides, surface roughness was investigated for the samples after single shot irradiation by CO2 laser at different pulse durations and duty cycles. The results show that the sample's surface roughness and crater depth increase with the increasing duration and duty cycle. The rate of increase rises gradually as the duration increases, while descends gradually as the duty cycle increases.

引用

页码：1031 / 1034

页数：3

共 8 条

[1] Hu J., Ma Z., Li W., Et al., 1064 nm pulse laser damage of oxide coatings, Acta Optica Sinica, 20, 2, pp. 262-266, (2000)
[2] Giulio M.D., Alvisi M., Perrone M.R., Et al., Laser damage testing of SiO2 and HfO2 thin films, Proc of SPIE, 3738, pp. 337-346, (1999)
[3] Chow R., Falabella S., Loomis E.G., Et al., Reactive evaporation of low-defect density hafnia, Appl Opt, 32, pp. 5567-5574, (1993)
[4] Fan Z., Zhao Q., Qiu H., Et al., Laser-induced damage in optical coating and laser condition technology, Proc of SPIE, 3244, pp. 469-474, (1998)
[5] Huang J., Lu H., Ye L., Et al., Damage threshold improvement of fused silica chip by CO2 laser pretreatment, Chinese Journal of Lasers, 34, 5, pp. 723-727, (2007)
[6] Zhang D., Zhang D., Fan S., Et al., Using ion post-treatment technique to improve laser induced damage threshold of thin films, High Power Laser and Particle Beams, 17, 2, pp. 213-216, (2005)
[7] Zhao S., Lu H., Ren H., Et al., Applications of CO2 laser treatment in optical surface, Laser and Optoelectronics Progress, 43, 3, pp. 43-47, (2006)
[8] Li X., Zu X., Yuan X., Et al., Effects of CO2 laser and vacuum plasma cleanings on silica-oil-and-grease polluted quartz substrates, High Power Laser and Particle Beams, 19, 10, pp. 1739-1743, (2007)

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