Evaluation of field electron emitter fabricated using focused-ion-beam chemical vapor deposition

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作者：
Kometani, Reo [1 ,2 ,3 ]
Kanda, Kazuhiro [1 ,2 ]
Haruyama, Yuichi [1 ,2 ]
Kaito, Takashi [4 ]
Matsui, Shinji [1 ,2 ]
机构：
[1] Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
[2] CREST, Japan Science and Technology Agency (JST), Kawaguchi Center Building, 4-1-8 Hon-cho, Kawaguchi, Saitama 332-0012, Japan
[3] JSPS Research Fellowships for Young Scientists, Japan Society for the Promotion of Science, Sumitomo-Ichiban-cho FS Building, 8 Ichiban-cho, Chiyoda-ku, Tokyo 102-8472, Japan
[4] SII NanoTechnology Inc., 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2006年 / 45卷 / 24-28期
关键词：
We carried out the field-emission characterization of materials; such as diamond-like carbon (DLC); W; and Fe; deposited by focused-ion-beam chemical vapor deposition (FIB-CVD) to develop a field emitter to be used as a nano-tool for spot deposition. As a result; the threshold voltage of the field emission from the DLC was lower than those from the W and Fe. In addition; we measured the work functions of these materials using photoelectron spectroscopy and found that DLC has a low work function. Furthermore; a field emitter with a DLC tip as a cold cathode was fabricated on a glass capillary; because it was found to be able to emit electrons from the DLC using a low voltage. We also confirmed that electrons were emitted from a DLC tip fabricated by FIB-CVD. © 2006 The Japan Society of Applied Physics;
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