Effect of gas injection pattern on magnetically expanding rf plasma source

被引：0
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作者：
Nakahama, Yugo [1 ]
Takahashi, Kazunori [1 ,2 ]
机构：
[1] Department of Electrical Engineering, Tohoku University, Sendai,980-8579, Japan
[2] National Institute for Fusion Science, Toki,509-5292, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1600年 / 63卷 / 09期
关键词：
53;
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摘要：
Journal article (JA)
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