Atomic force microscope for large size sample (1st Report, application of coarse-fine positioning mechanisms in AFM)

被引：0
|
作者：
Hitachi-kenki Finetech Co., Ltd., 650 Kandatsu, Tsuchiura-shi, Ibaraki, 300-0013, Japan [1 ]
机构：
来源：
Nihon Kikai Gakkai Ronbunshu C | 2006年 / 8卷 / 2507-2511期
关键词：
D O I：
10.1299/kikaic.72.2507
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 5 条
  • [1] DESIGN OF AN ATOMIC FORCE MICROSCOPE AND 1ST RESULTS
    HEINZELMANN, H
    GRUTTER, P
    MEYER, E
    HIDBER, H
    ROSENTHALER, L
    RINGGER, M
    GUNTHERODT, HJ
    SURFACE SCIENCE, 1987, 189 : 29 - 35
  • [2] APPLICATION OF ELECTROMAGNETIC IMPULSIVE FORCE TO PRECISE POSITIONING (1ST REPORT) - POSITIONING MECHANISM AND FUNDAMENTAL EXPERIMENT
    HOJJAT, Y
    HIGUCHI, T
    BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1991, 25 (01): : 39 - 44
  • [3] Large eddy simulation of diesel spray in constant volume vessel (1st report, effect of grid size on non-evaporative diesel spray)
    Department of Mechanical Engineering, Doshisha University, 1-3 Miyakodani, Kyotanabe shi, Kyoto, 610 0321, Japan
    Nihon Kikai Gakkai Ronbunshu, B, 2007, 3 (879-886):
  • [4] Micro-shape machining with a thin blade enhanced by a fine-particle noncontact-mode process (1st report) - fundamental characteristics and application to optical communication devices
    Matsui, Shinsuke
    Saito, Tadao
    Watanabe, Junji
    Ohira, Fumikazu
    Koyabu, Kunio
    Takeuchi, Yoshio
    Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 1998, 64 (01): : 162 - 166
  • [5] 3D micro-fabrication using combination technique of nano-scale processing and chemical etching (1st report, possibility of 3 D micro-fabrication using the mechanism of friction force microscope)
    Kawasegi, Noritaka
    Morita, Noboru
    Yamada, Shigeru
    Takano, Noboru
    Oyama, Tatsuo
    Ashida, Kiwamu
    Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 2004, 70 (08): : 2533 - 2540
1