Dependence of particle size on the removal of particles on a silicon surface by using electrostatic force

被引：0
|
作者：
机构：
[1] Takahashi, Kazue
来源：
Takahashi, K. | 1600年 / Vacuum Society of Japan卷 / 57期
关键词：
Particle size;
D O I：
10.3131/jvsj2.57.140
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] SURFACE CLEANING BY ELECTROSTATIC REMOVAL OF PARTICLES
    COOPER, DW
    WOLFE, HL
    YEH, JTC
    MILLER, RJ
    AEROSOL SCIENCE AND TECHNOLOGY, 1990, 13 (01) : 116 - 123
  • [2] SURFACE CLEANING BY ELECTROSTATIC REMOVAL OF PARTICLES
    COOPER, DW
    WOLFE, HL
    YEH, JTC
    MILLER, RJ
    1989 PROCEEDINGS :: 35TH ANNUAL TECHNICAL MEETING - BUILDING TOMORROWS ENVIRONMENT, 1989, : 334 - 339
  • [3] Particle separation using acoustic radiation force and electrostatic force
    Yasuda, K
    Umemura, S
    Takeda, K
    JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1996, 99 (04): : 1965 - 1970
  • [4] CALCULATION OF THE SIZE DEPENDENCE OF THE COERCIVE FORCE IN FINE PARTICLES
    LYBERATOS, A
    CHANTRELL, RW
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 2119 - 2121
  • [5] Influence of removal time and particle size on the particle substrate adhesion force
    Felicetti, M. A.
    Piantino, F.
    Coury, J. R.
    Aguiar, M. L.
    BRAZILIAN JOURNAL OF CHEMICAL ENGINEERING, 2008, 25 (01) : 71 - 82
  • [6] ADHESION OF PARTICLES ON A ROUGH SURFACE .4. DEPENDENCE OF ADHESIVE FORCES ON PARTICLE-SIZE
    ZIMON, AD
    SEREBRYA.GA
    RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY,USSR, 1972, 46 (01): : 69 - &
  • [7] Removal of particles from surface of silicon using clean solutions with surfactants and chelates
    Cao, BC
    Yu, XH
    Ma, HL
    Ma, J
    Liu, ZL
    PROCEEDINGS OF THE 25TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, PTS I AND II, 2001, 87 : 449 - 450
  • [8] PARTICLE REMOVAL FROM SILICON SUBSTRATES USING SURFACE-TENSION FORCES
    LEENAARS, AFM
    OBRIEN, SBG
    PHILIPS JOURNAL OF RESEARCH, 1989, 44 (2-3) : 183 - 209
  • [9] PULMONARY CLEARANCE OF INHALED PARTICLES IN DEPENDENCE OF PARTICLE-SIZE
    MUHLE, H
    BELLMANN, B
    JOURNAL OF AEROSOL SCIENCE, 1986, 17 (03) : 346 - 349
  • [10] Particle size dependence of nano-magnetite in arsenic removal
    Yavuz, C. T.
    Mayo, J. T.
    Yean, S.
    Cong, L.
    Yu, W.
    Falkner, J.
    Kan, A.
    Tomson, M.
    Colvin, V. L.
    SOHN INTERNATIONAL SYMPOSIUM ADVANCED PROCESSING OF METALS AND MATERIALS, VOL 3: THERMO AND PHYSICOCHEMICAL PRINCIPLES: SPECIAL MATERIALS AND AQUEOUS AND ELECTROCHEMICAL PROCESSING, 2006, : 221 - +
12345