Fabrication of micro tetrahedron patterns using ultra-precision shaping system

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作者：
Department of Nano Fusion Technology, Pusan National University, Miryang, Korea, Republic of [1 ]
不详 [2 ]
不详 [3 ]
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来源：
Key Eng Mat | 2008年 / 469-472期
关键词：
Geometry;
D O I：
10.4028/www.scientific.net/kem.381-382.469
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