Analysis of thermal diffusivity for TiNx thin films using thermoreflectance technique

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作者：
Graduate School of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, Japan [1 ]
不详 [2 ]
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来源：
J.Vac. Soc.Japan | 2008年 / 6卷 / 382-385期
关键词：
Thin films;
D O I：
10.3131/jvsj2.51.382
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