Al concentration-dependent electrical modulation of Al-doped ZnO thin film using atomic layer deposition

被引：0
|
作者：
Choi, Ji Woon [1 ]
Ryu, Jin Joo [1 ,2 ]
Song, Wooseok [1 ,3 ]
Kim, Gun Hwan [2 ,4 ]
Chung, Taek-Mo [1 ,5 ]
机构：
[1] Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon,34114, Korea, Republic of
[2] Department of Materials Science and Engineering, Yonsei University, Seoul,03722, Korea, Republic of
[3] School of Electronic and Electrical Engineering, Sungkyunkwan University, Suwon,16149, Korea, Republic of
[4] Department of System Semiconductor Engineering, Yonsei University, Seoul,03722, Korea, Republic of
[5] Dept. of Chemical Convergence Materials, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon,34113, Korea, Republic of
来源：
Ceramics International | 2024年 / 50卷 / 22期
关键词：
28;
D O I：
10.1016/j.ceramint.2024.09.132
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：48843 / 48848
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