A Review on MEMS/NEMS-Based Biosensor

被引：0
|
作者：
Li D.-J. [1 ,2 ]
Chen H.-Y. [1 ,2 ]
Liu C.-R. [1 ,2 ]
Fan K. [1 ,2 ]
Wang G.-F. [1 ,2 ]
机构：
[1] Hangzhou Dianzi University, Hangzhou
[2] Small Microsensor and Microsystem Engineering Research Center of Ministry of Education, Hangzhou
来源：
Tien Tzu Hsueh Pao/Acta Electronica Sinica | 2021年 / 49卷 / 06期
关键词：
Biosensing technology; Devices; MEMS/NEMS (Micro/Nano Electro-Mechanical Systems) technology; Sensing mechanism; Technical difficulties;
D O I：
10.12263/DZXB.20200266
中图分类号：
学科分类号：
摘要：
MEMS/NEMS (Micro/Nano Electro-Mechanical Systems) technology, as a mature microstructure manufacturing technology, can realize the mass production and integration of silicon-based nano-scale sensor devices.Moreover, it's easy to achieve small, light, and high performance miniature sensor and its test system.Biosensing technology can transform biological reaction signals into photoelectric signals.Compared with other biosensors, MEMS/NEMS-based biosensors have higher sensitivity, shorter response time, and stronger detection performance, which provide powerful support for automated high-throughput medical diagnosis.This paper focuses on the common device types of MEMS/NEMS-based biosensors and their manufacturing technology, materials, sensing mechanism, classification, and sensing limitation.By reviewing MEMS/NEMS biosensors and their research progress, the key technical difficulties and priorities of MEMS/NEMS biosensor are summarized.Finally, we discuss the future development prospects and existing challenges of MEMS/NEMS-based biological sensing technology. © 2021, Chinese Institute of Electronics. All right reserved.
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页码：1228 / 1236
页数：8
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