Thermoreflectance property of gallium nitride

被引：0
|
作者：
Chen, Yusa [1 ,2 ]
Wu, Meizhang [3 ,4 ]
Mo, Jianghui [5 ,6 ]
Liu, Yan [6 ]
Zhai, Yuwei [6 ]
Wu, Wengang [1 ,2 ]
Wu, Aihua [6 ]
Liang, Faguo [6 ]
机构：
[1] National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Beijing,100871, China
[2] School of Integrated Circuits, Peking University, Beijing,100871, China
[3] School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing,100096, China
[4] School of Automation, University of Science and Technology Beijing, Beijing,100083, China
[5] School of Software and Microelectronics, Peking University, Beijing,100871, China
[6] Hebei Semiconductor Research Institute, Shijiazhuang,050051, China
来源：
Microelectronics Journal | 2024年 / 154卷
关键词：
D O I：
10.1016/j.mejo.2024.106468
中图分类号：
学科分类号：
摘要：
Optical depth
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