Macroscale Tribological Properties of Multi-layer Carbide-bonded Graphene Coating

被引：0
|
作者：
Wang B. [1 ]
Zhou J. [1 ]
Zhu C. [1 ]
Li L. [2 ]
Ye J. [1 ]
Liu X. [1 ]
Liu K. [1 ]
机构：
[1] School of Mechanical Engineering, Hefei University of Technology, Hefei
[2] Sino-German College of Intelligent Manufacturing, Shenzhen Technology University, Shenzhen
来源：
Zhongguo Biaomian Gongcheng/China Surface Engineering | 2022年 / 35卷 / 06期
基金：
中国国家自然科学基金;
关键词：
carbide-bonded graphene coating; friction and wear; scratch; wear particle;
D O I：
10.11933/j.issn.1007-9289.20211127001
中图分类号：
学科分类号：
摘要：
Graphene has important applications as a solid lubricant, but the protective effect of multi-layer graphene coatings on silicon devices in the MEMS under macroscale load remains to be further explored. The tribological properties of a multi-layer carbide-bonded graphene (CBG) coating on silicon substrate with a thickness of 230 nm are investigated under normal temperature and high contact stress, by using a reciprocating linear friction testing machine. The experimental results show that the CBG coating significantly reduce the friction factor and wear degree of the silicon surface. When the loads increase from 1 N (about 551 MPa) to 5 N (about 942 MPa), the friction factor are always stabilized between 0.12 and 0.18. Furthermore, the friction factor remains below 0.2 and the minimum wear rate is about 5.0×10-7 mm3 / (N·m) in 18 000 cycles and under a heavy load of 5 N, which effectively verifies the excellent friction and wear properties of CBG coating at the macroscale. The bulk fragments, peeling pits and continuous scratches on the CBG coating are the basic defects of wear degradation, and the ploughing behavior of wear particles under high contact stress may be the main reasons for the gradual peeling-off of coating. The results show that CBG coating has excellent anti-friction and wear resistance under macroscale load, and reveal the wear process and failure mechanism of the coating. © 2022 Chinese Mechanical Engineering Society. All rights reserved.
引用
收藏
页码：161 / 170
页数：9
相关论文
共 37 条
  • [1] JIANG Ronghua, XIAO Shunzhen, Recent development of semiconductor silicon material, Semiconductor Technology, 27, 2, pp. 3-6, (2002)
  • [2] KU I S Y, REDDYHOFF T, HOLMES A S, Et al., Wear of silicon surfaces in MEMS, Wear, 271, 7, pp. 1050-1058, (2011)
  • [3] SHEN S, MENG Y., A novel running-in method for improving life-time of bulk-fabricated silicon MEMS devices, Tribology Letters, 47, 2, pp. 273-284, (2012)
  • [4] KONG Shang, HU Wenjing, LI Jiusheng, Tribological properties of graphene in PAO base oils, China Surface Engineering, 32, 3, pp. 162-169, (2019)
  • [5] YANG Hongmei, LI Jiusheng, ZENG Xiangqiong, Tribological behavior of edge-functionalized Pickering emulsion of alkyl amine oxide graphene, China Surface Engineering, 32, 5, pp. 151-159, (2019)
  • [6] ZHU Jie, NI Zifeng, CHEN Guomei, Et al., Study on friction and wear properties of graphene oxide/ultra-high molecular weight polyethylene composites, Plastics Industry, 42, 3, pp. 103-106, (2014)
  • [7] JIAN Xuezhen, LI Hua, FANG Guangqiang, Et al., Friction and wear properties of PTFE composites containing carbon nanotubes and graphene, Functional Materials, 3, pp. 11-16, (2014)
  • [8] HUANG Y, YAO Q, QI Y, Et al., Wear evolution of monolayer graphene at the macroscale, Carbon, 115, pp. 600-607, (2017)
  • [9] WON M S, PENKOV O V, KIM D E., Durability and degradation mechanism of graphene coatings deposited on Cu substrates under dry contact sliding, Carbon, 54, 2, pp. 472-481, (2013)
  • [10] WU P, LI X, ZHANG C, Et al., Self-assembled graphene film as low friction solid lubricant in macroscale contact, ACS Applied Materials & Interfaces, 9, 25, pp. 21554-21562, (2017)
1234