Integrated electro-optic modulator on a lead zirconate titanate-silicon nitride heterogeneous platform

被引：0
|
作者：
Zhou, Wenfeng [1 ]
Zhang, Yong [1 ,2 ]
Jiang, Yongheng [3 ]
Zhang, Pu [3 ]
Shen, Jian [1 ]
Zhang, Xun [1 ]
Chen, Yuqi [1 ]
Sun, Min [1 ]
Qiu, Feng [4 ]
Xiao, Huifu [3 ]
Tian, Yonghui [3 ]
Su, Yikai [1 ]
机构：
[1] State Key Lab of Advanced Optical Communication Systems and Networks, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai,200240, China
[2] State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai,200241, China
[3] School of Physical Science and Technology, Lanzhou University, Gansu, Lanzhou,730000, China
[4] Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Zhejiang, Hangzhou,310024, China
来源：
Optics Letters | 2024年 / 49卷 / 22期
关键词：
Integrated electro-optic (EO) modulators are the core components of the optoelectronic information technology; and lithium niobate is currently the most widely used crystalline thin film material; however; finite EO coefficients limit the modulation efficiency of the modulators. In this Letter; we present an integrated EO modulator using a microring resonator on the lead zirconate titanate (PZT) and silicon nitride (SiN) heterogeneous platform. The microwave attenuation is reduced by using low loss tangent and dielectric constant SiN as the electrode substrate; achieving an EO bandwidth of 33 GHz. Thanks to the high quality of the PZT film deposition and the substantial EO overlap of our structure; ultrahigh modulation efficiency with the half-wave voltage-length product of 0.7 V·cm is achieved. In addition; as a remarkable result; an 80-Gbps on–off keying signal is generated using the modulator. © 2024 Optica Publishing Group. All rights;
D O I：
10.1364/OL.538022
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：6353 / 6356
相关论文
共 50 条
  • [1] Plasmonic electro-optic modulators on lead zirconate titanate platform
    Yezekyan, Torgom
    Thomaschewski, Martin
    Thrane, Paul Conrad Vaagen
    Bozhevolnyi, Sergey I.
    NANOPHOTONICS, 2024, 13 (18) : 3591 - 3598
  • [2] A Hybrid Barium Titanate-Silicon Photonics Platform for Ultraefficient Electro-Optic Tuning
    Abel, Stefan
    Stoeferle, Thilo
    Marchiori, Chiara
    Caimi, Daniele
    Czornomaz, Lukas
    Stuckelberger, Michael
    Sousa, Marilyne
    Offrein, Bert J.
    Fompeyrine, Jean
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2016, 34 (08) : 1688 - 1693
  • [3] Ultra-Low-Power Tuning in Hybrid Barium Titanate-Silicon Nitride Electro-optic Devices on Silicon
    Ortmann, J. Elliott
    Eltes, Felix
    Caimi, Daniele
    Meier, Norbert
    Demkov, Alexander A.
    Czornomaz, Lukas
    Fompeyrine, Jean
    Abel, Stefan
    ACS PHOTONICS, 2019, 6 (11): : 2677 - 2684
  • [4] High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate
    Ruan, Ziliang
    Chen, Kaixuan
    Wang, Zong
    Fan, Xuancong
    Gan, Ranfeng
    Qi, Lu
    Xie, Yiwei
    Guo, Changjian
    Yang, Zhonghua
    Cui, Naidi
    Liu, Liu
    LASER & PHOTONICS REVIEWS, 2023, 17 (04)
  • [5] Integrated silicon carbide electro-optic modulator
    Powell, Keith
    Li, Liwei
    Shams-Ansari, Amirhassan
    Wang, Jianfu
    Meng, Debin
    Sinclair, Neil
    Deng, Jiangdong
    Loncar, Marko
    Yi, Xiaoke
    NATURE COMMUNICATIONS, 2022, 13 (01)
  • [6] Integrated silicon carbide electro-optic modulator
    Keith Powell
    Liwei Li
    Amirhassan Shams-Ansari
    Jianfu Wang
    Debin Meng
    Neil Sinclair
    Jiangdong Deng
    Marko Lončar
    Xiaoke Yi
    Nature Communications, 13
  • [7] Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films
    Zhu, M. M.
    Du, Z. H.
    Ma, J.
    AIP ADVANCES, 2011, 1 (04):
  • [8] Electro-Optic Barium Titanate Modulators on Silicon Photonics Platform
    Posadas, A. B.
    Stenger, V. E.
    DeFouw, J.
    Mashanovich, G. Z.
    Wasserman, D.
    Demkov, A. A.
    2023 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS, 2023,
  • [9] A silicon integrated BaTiO3 electro-optic modulator
    Xiong, Chi
    Pernice, Wolfram H. P.
    Ngai, Joseph H.
    Reiner, James W.
    Kumah, Divine
    Walker, Frederick J.
    Ahn, Charles H.
    Tang, Hong X.
    2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
  • [10] RF-sputtered Z-cut electro-optic barium titanate modulator on silicon photonic platform
    Posadas, Agham B. B.
    Stenger, Vincent E. E.
    DeFouw, John D. D.
    Warner, Jamie H. H.
    Demkov, Alexander A. A.
    JOURNAL OF APPLIED PHYSICS, 2023, 134 (07)
12345