Design and Control of a Flexible Positioning Stage Driven by Voice Coil Motors

被引：0
|
作者：
Tian Y. [1 ]
Bao Y. [1 ]
Wang F. [1 ,2 ]
Cai K. [1 ]
Yang C. [1 ]
Zhang D. [1 ]
机构：
[1] Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, Tianjin
[2] Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, Guangzhou
来源：
Tianjin Daxue Xuebao (Ziran Kexue yu Gongcheng Jishu Ban)/Journal of Tianjin University Science and Technology | 2017年 / 50卷 / 10期
基金：
中国国家自然科学基金; 欧盟地平线“2020”;
关键词：
Characteristics analysis; Control; Identification; Micro positioning stage;
D O I：
10.11784/tdxbz201611054
中图分类号：
学科分类号：
摘要：
A flexible micro positioning stage with 2-DOF driven by voice coil motors has been designed. The stage mainly contains voice coil motors and flexible hinge mechanism. A double parallel four-bar linkage composed of right angle flexible hinges was placed symmetrically in order to achieve a large motion stroke and motion decoupling. Its working stroke can reach more than 2, mm and positioning accuracy can reach the nanometer level. The space support mechanism was designed to ensure its carrying capacity. The structural design, bearing capacity and dynamic characteristics of the micro positioning stage were analyzed. Considering the characteristic of the dynamic behavior of the positioning stage, the BP neural network identification method optimized by genetic algorithm was used to identify the system model, which overcame the shortcomings of the neural network in dynamic behavior identification of complex system. Then the neural network PID compound inverse control method was applied to control the system. Experiments were carried out to verify the identification and control methods. The experimental results show that the neural network identification method optimized by genetic algorithm and the neural network PID compound inverse control method are suitable for the practical application of the flexible micro positioning system driven by voice coil motors. © 2017, Editorial Board of Journal of Tianjin University(Science and Technology). All right reserved.
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页码：1070 / 1076
页数：6
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