Fluid Actuators Using Surface Acoustic Waves and Their Applications

被引：0
|
作者：
Tsunemasa, Saiki [1 ,2 ]
Yuichi, Utsumi [3 ]
机构：
[1] Project Management Department, Hyogo Prefectural Institute of Technology, 3-1-12 Yukihira-cho, Suma-ku, Hyogo, Kobe,654-0037, Japan
[2] Graduate School of Engineering, University of Hyogo, 2167 Shosha, Hyogo, Himeji,671-2280, Japan
[3] Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori-cho, Hyogo, Ako-gun,678-1205, Japan
来源：
Journal of Japan Institute of Electronics Packaging | 2024年 / 27卷 / 04期
关键词：
D O I：
10.5104/jiep.27.325
中图分类号：
学科分类号：
摘要：
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页码：325 / 333
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