Large-area broadband ultralow reflectance biomimetic structures silicon via femtosecond laser inducing and chemical etching

被引：0
|
作者：
Zhou, Kun [1 ,2 ,3 ]
Yuan, Yanping [1 ,2 ,3 ]
Wang, Chunlian [1 ,2 ,3 ]
Chen, Jimin [1 ,2 ,3 ]
机构：
[1] Institute of Laser Engineering, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing,100124, China
[2] Key Laboratory of Trans-scale Laser Manufacturing Technology (Beijing University of Technology), Ministry of Education, Beijing,100124, China
[3] Beijing Engineering Research Center of 3D Printing for Digital Medical Health, Beijing University of Technology, Beijing,100124, China
来源：
Journal of Manufacturing Processes | 2024年 / 132卷
关键词：
43;
D O I：
10.1016/j.jmapro.2024.10.079
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：122 / 129
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