Fabrication and thermal-optical properties of vanadium oxide films

被引：0
|
作者：
Yang, Ai-Guo
Yang, Zi-Jian
Yang, Jian-Hong
Feng, Hao
Li, Guan-Bin
Cui, Jing-Zhong
机构：
[1] School of Physics, Lanzhou University, Lanzhou 730000, China
[2] Lanzhou Institute of Physics, Lanzhou 730000, China
来源：
Bandaoti Guangdian/Semiconductor Optoelectronics | 2008年 / 29卷 / 02期
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学科分类号：
摘要：
Ti-and Al-doped vanadium oxide films were deposited using magnetron co-sputtering techniques on quartz substrates. The technical aspects for preparing the films were investigated, with emphasis on the optimization of deposition conditions such as pressure and temperature. Measurements were performed on the thermal and optical properties of the films including resistance-temperature dependence and transmittance-wavelength dependence. The measurement results are discussed and analyzed.
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页码：200 / 202
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