Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools with Wafer Revisiting

被引：0
|
作者：
Wu, NaiQi [1 ]
Chu, Feng [2 ]
Chu, Chengbin [3 ]
Zhou, MengChu [4 ,5 ]
机构：
[1] Department of Industrial Engineering, School of Mechatronics Engineering, Guangdong University of Technology, Guangzhou 510006, China
[2] Laboratoire Informatique, Biologie Intégrative et Systèmes Complexes EA 4526, Université d'Evry Val d'Essonne, 91020 Evry Cédex, France
[3] Laboratoire Génie Industriel, Ecole Centrale Paris, 92295 Châtenay-Malabry Cedex, France
[4] Key Laboratory of Embedded System and Service Computing, Ministry of Education, Tongji University, Shanghai 200092, China
[5] Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ 07102-1982, United States
来源：
IEEE Transactions on Systems, Man, and Cybernetics: Systems | 2013年 / 43卷 / 01期
关键词：
D O I：
10.1109/tsmca.2012.2187890
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：196 / 207
相关论文
共 50 条
  • [1] Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting
    Wu, NaiQi
    Chu, Feng
    Chu, Chengbin
    Zhou, MengChu
    [J]. IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS, 2013, 43 (01): : 196 - 207
  • [2] Petri Net-Based Cycle Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting and Swapping Strategy
    Wu, NaiQi
    Chu, Feng
    Chu, Chengbin
    Zhou, MengChu
    [J]. 2011 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2011,
  • [3] A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting
    Qiao, Yan
    Wu, NaiQi
    Zhou, MengChu
    [J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2013, 26 (01) : 100 - 110
  • [4] A petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting
    Wu, NaiQi
    Zhou, MengChu
    Chu, Feng
    Chu, Chengbin
    [J]. IEEE Transactions on Systems, Man, and Cybernetics: Systems, 2013, 43 (05) : 1182 - 1194
  • [5] A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting
    Wu, NaiQi
    Zhou, MengChu
    Chu, Feng
    Chu, Chengbin
    [J]. IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS, 2013, 43 (05): : 1182 - 1194
  • [6] Petri Net-Based Scheduling Analysis of Dual-Arm Cluster Tools Subject to Wafer Revisiting and Residency Time Constraints
    Qiao, Yan
    Wu, NaiQi
    Zhou, MengChu
    Dai, QingYun
    [J]. 2013 10TH IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC), 2013, : 252 - 257
  • [7] Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
    Qiao, Yan
    Wu, NaiQi
    Zhu, QingHua
    Bai, LiPing
    [J]. COMPUTERS & OPERATIONS RESEARCH, 2015, 53 : 252 - 260
  • [8] Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints
    Qiao, Yan
    Wu, Naiqi
    Zhou, MengChu
    [J]. IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS, 2014, 10 (01) : 286 - 300
  • [9] A Novel Scheduling Approach to Dual-Arm Cluster Tools with Wafer Revisiting
    Wu, NaiQi
    Zhou, MengChu
    [J]. PROCEEDINGS 2012 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS (SMC), 2012, : 1213 - 1218
  • [10] Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting
    Wang, Jipeng
    Hu, Hesuan
    Pan, Chunrong
    Li, Liang
    [J]. IEEE ACCESS, 2021, 9 : 50093 - 50105
12345