Diagnostics of tin droplet-based laser produced plasma by triple Langmuir probe

被引：0
|
作者：
Chen, Zegong [1 ]
Zuo, Duluo [2 ]
Wang, Xinbing [2 ]
机构：
[1] School of Optical and Electronic Information, Huazhong University of Science and Technology, 1037 Luoyu Road, Hongshan District, Wuhan,430074, China
[2] Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, 1037 Luoyu Road, Hongshan District, Wuhan,430074, China
来源：
Vacuum | 2024年 / 230卷
关键词：
Compendex;
D O I：
10.1016/j.vacuum.2024.113742
中图分类号：
学科分类号：
摘要：
Electron density measurement - Extreme ultraviolet lithography - Laser produced plasmas - Plasma diagnostics - Prisms - Surface discharges - Ultraviolet devices - Ultraviolet lasers - Wigglers
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