Low-temperature deposition and bonding performance of silicon nanocrystals in silicon oxide films

被引：0
|
作者：
Yu, Wei [1 ]
Wang, Jian-Tao [1 ]
Li, Yun [1 ]
Guo, Shao-Gang [1 ]
Zhu, Hai-Rong [1 ]
Fu, Guang-Sheng [1 ]
机构：
[1] College of Physics Science and Technology, Hebei University, Baoding 071002, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2013年 / 42卷 / 06期
关键词：
641.1 Thermodynamics - 761 Nanotechnology - 801.4 Physical Chemistry - 804 Chemical Products Generally - 931.3 Atomic and Molecular Physics - 933.1 Crystalline Solids - 951 Materials Science;
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摘要：
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页码：1035 / 1040
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