Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator

被引：0
|
作者：
Chen H. [1 ]
Wang X. [1 ]
Wang J. [1 ]
Xi Z. [1 ]
Nie W. [1 ]
机构：
[1] School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing
来源：
Shanghai Jiaotong Daxue Xuebao/Journal of Shanghai Jiaotong University | 2021年 / 55卷 / 10期
关键词：
Coupling; Edge detection; Electrothermal actuator; Forced vibration; Sine transformation;
D O I：
10.16183/j.cnki.jsjtu.2020.216
中图分类号：
学科分类号：
摘要：
To study the dynamic performance of the V-shaped electrothermal actuator, electrothermal and thermoelastic coupling models are established based on the heat transfer theory and the forced vibration equation, respectively. A one dimensional multi-physical field coupling theoretical model of the V-shaped electrothermal actuator is proposed. The electrothermal coupling model is solved by the method in which the sine transformation and the implicit difference are combined together. Then, a convergence test is performed. The number of discrete points in the sine transformation has less influence on the temperature stability. The transient and static temperature distributions of the model coincide with that of the finite element method (FEM) at different voltages. The static displacements gained by the experiment and the edge detection algorithm also match well with that gained by the thermoelastic coupling model at different voltages. Based on the proposed model, the dynamic performances of the actuator at step and sine voltages are analyzed. The research results indicate that changes of temperature and displacement in the middle of the V-shaped electrothermal actuator are larger with the amplitude of sine voltage increasing. When the loading time of sine voltage is larger than 5 periods (50 ms), the average temperature and displacement in the middle of the actuator are equal to those with equivalent direct voltage. When applied to a periodic voltage, the motion of the actuator is also gradually cyclical and has the same time period with the voltage cycle. © 2021, Shanghai Jiao Tong University Press. All right reserved.
引用
收藏
页码：1263 / 1271
页数：8
相关论文
共 21 条
  • [1] HUSSEIN H, TAHHAN A, MOAL P L, Et al., Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator, Journal of Micromechanics and Microengineering, 26, 2, (2016)
  • [2] LEE C, WU C Y., Study of electrothermal V-beam actuators and latched mechanism for optical switch, Journal of Micromechanics and Microengineering, 15, 1, pp. 11-19, (2004)
  • [3] PUSTAN M, CHIOREAN R, BIRLEANU C, Et al., Reliability design of thermally actuated MEMS switches based on V-shape beams, Microsystem Technologies, 23, 9, pp. 3863-3871, (2017)
  • [4] ZHANG Z, YU Y Q, ZHANG X P., Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators, Microsystem Technologies, 24, 7, pp. 3149-3160, (2018)
  • [5] SHEN Yueyue, The research of electrothermal actuator applied in MEMS safe and ARM system on silicon, (2015)
  • [6] ZHANG Z, YU Y Q, LIU X Y, Et al., Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators, Microsystem Technologies, 23, 8, pp. 3775-3789, (2017)
  • [7] VAMEGH ESTAHBANATI S, DHAOUADI R, BAKRI-KASSEM M., Macromodeling of thermally driven V-shaped MEMS actuators, Mechatronics, 46, pp. 193-204, (2017)
  • [8] ZHANG Z, ZHANG W Z, WU Q Y, Et al., A comprehensive analytical model and experimental validation of Z-shaped electrothermal microactuators, Recent advances in mechanism design for robotics, (2015)
  • [9] SHAN T Q, QI X L, CUI L, Et al., Thermal behavior modeling and characteristics analysis of electrothermal microactuators, Microsystem Technologies, 23, 7, pp. 2629-2640, (2017)
  • [10] THANGAVEL A, RENGASWAMY R, SUKUMAR P K, Et al., Modelling of Chevron electrothermal actuator and its performance analysis, Microsystem Technologies, 24, 4, pp. 1767-1774, (2018)
123