A Planar Two-dimensional Time-grating Displacement Senor with Differential Structure

被引：0
|
作者：
Yang J. [1 ]
Mou Z. [1 ]
Li L. [1 ]
Shao Z. [1 ]
Tian Q. [1 ]
机构：
[1] Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2020年 / 31卷 / 12期
关键词：
Differential structure; Directly decoupling measurement; Planar coil; Time-grating displacement sensor; Two-dimensional displacement;
D O I：
10.3969/j.issn.1004-132X.2020.12.008
中图分类号：
学科分类号：
摘要：
Aiming to solve the problems of complex measuring system, difficult to guarantee detect synchronicity and complex decoupling algorithm in two-dimensional displacement measuring using two sets of high-precision one-dimensional sensing devices, a two-dimensional sensing signal direct decoupling method was proposed based on differential structure to study a planar coil type 2D time-grating displacement sensor. A 2D displacement direct decoupling model was constructed and the basic structure of the sensor was designed based on the traditional electromagnetic time-grating technology. The 3D structure model of the sensor was built and the electromagnetic simulation was carried out by ANSYS Maxwell. The error analysis and traceability were performed. Based on this, the sensor prototype was developed and the experiments were performed. The experimental results show that the prototype has errors of 91 μm and 74 μm in X and Y directions respectively in the measurement range of 79.2 mm×79.2 mm. It may realize two-dimensional displacement synchronous detection and direct decoupling, and the measurement system has simple structure and small size, which provides important reference for the research of higher performance two-dimensional time-grating sensors. © 2020, China Mechanical Engineering Magazine Office. All right reserved.
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页码：1444 / 1451and1460
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