Real-time nonlinearity error correction method of polarizing laser interferometer

被引：0
|
作者：
Liu B. [1 ]
Yuan Y. [1 ]
Wang X. [1 ]
Huang F. [1 ]
Yang J. [1 ]
Yuan L. [1 ]
机构：
[1] Photonics Research Center, School of Science, Harbin Engineering University, Harbin
来源：
Guangxue Xuebao/Acta Optica Sinica | 2010年 / 30卷 / 09期
关键词：
Elliptical fitting; Error correction; Nonlinearity error; Optical measurement; Polarized interferometer;
D O I：
10.3788/AOS20103009.2585
中图分类号：
学科分类号：
摘要：
A nonlinearity correction method for a homodyne polarized laser interferometer is proposed, which can compensate nonlinearity error for the interferometer in real-time. Because of the parameter errors, adjusting errors of optical components environment disturbing effect, the output signals' orthogonal characteristic is destroyed, which causes the nonlinearity error. Based on the ellipse fitting principle, nonlinearity error correction method is proposed. It doses a real-time estimation of the interference signal's parameter characteristics and studies phase correction range that affects the correction error, then fractionizes signal by 16384 subdivisions, then a result with picometer resolution is realized. A correction criterion for real-time nonlinearity correction is proposed. A homodyne polarized laser interferometer and vibration measurement facility are established. The experimental results indicate that the signal-noise ratio of the interferometer with the nonlinear correction is 30 dB more than the one and measurement resolution is superior to 10 pm/Hz1/2.
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页码：2585 / 2589
页数：4
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共 20 条
  • [1] Wu C.M., Su C.S., Peng G.S., Et al., Polarimetric, nonlinearity-free, homodyne interferometer for vibration measurement, Metrologia, 33, 6, pp. 533-537, (1996)
  • [2] Chen B., Zhen S., Li M., Et al., Four-channel balancing method for micro-vibration measurement, Acta Optica Sinica, 29, 6, pp. 309-312, (2009)
  • [3] Bobroff N., Recent advances in displacement measuring interferometry, Meas. Sci. Technol., 4, 19, pp. 907-926, (1993)
  • [4] Deng Y., Li Y., Wu Y., Et al., Influence of metal-coated mirrors on measurement accuracy in heterodyne interferometric ellipsometry, Chinese J. Lasers, 36, 2, pp. 439-443, (2009)
  • [5] Chen B., Mu R., Zhou Y., Et al., Nonlinear error analysis of laser synthetic-wavelength nanomeasurement interferometer, Chinese J. Lasers, 35, 2, pp. 240-244, (2008)
  • [6] Chen H., Ding X., Zhong Z., Et al., Method to reduce first harmonic nonlinearity in laser heterodyne interferometry, Acta Optica Sinica, 27, 6, pp. 1027-1030, (2007)
  • [7] Zeng D., Xiao T., Xi Z., Et al., Detector nonlinear error and compensation in phase-stepping interferometry, Acta Optica Sinica, 26, 9, pp. 1358-1362, (2006)
  • [8] Wu C., Su C., Nonlinearity in measurements of length by optical interferometry, Meas. Sci. Technol., 7, 1, pp. 62-68, (1996)
  • [9] Heydemann P.L.M., Determination and correction of quadrature fringe measurement error in interferometers, Appl. Opt., 20, 19, pp. 3382-3384, (1981)
  • [10] Farrell C.T., Player M.A., Phase step measurement and variable step algorithms in phase-shifting interferometry, Meas. Sci. Technol., 3, 10, pp. 953-958, (1992)
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