Composition analysis of residual gases in extremely high vacuum calibration chamber

被引：0

作者：

Cheng Y. ^{[1
]}

Li D. ^{[1
]}

Zhang D. ^{[1
]}

Feng Y. ^{[1
]}

Lu Y. ^{[1
]}

Zhao L. ^{[1
]}

Xu J. ^{[1
]}

机构：

[1] National Key Lab of Vacuum and Cryogenic Technology and Physics, Lanzhou Institute of Physics

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2010年 / 30卷 / 01期

关键词：

Extremely high vacuum; Non-evaporable getter pump; Quadrupole mass spectrometer; Residual gas; Stainless steel;

D O I：

10.3969/j.issn.1672-7126.2010.01.11

中图分类号：

学科分类号：

摘要：

The compositions of the residual gases in the extremely high vacuum (XHV) calibration chamber, made of stainless steel with a volume of 316L, were analyzed with a quadrupole mass spectrometer (QMS) before and after baking at 300°C to study the gas species evolution during degassing. Before baking and after the hot cathode ionization gauge was turned on and the degassing was done, the dominant outgas species were found to be H2O, CO, H2, CH4 and CO2. After baking, followed by on-and-off of the gauge and its degassing, the major out-gassed species were CO, H2, CO2, and CH4. The chamber was pumped down with a turbo-molecular pump to a base pressure of 8.97×10-9Pa at room temperature, and the residual gases were H2 and CO two hours later. Interesting finding is that the pumping speed of the non-evaporable getter pump (NEGP) is fairly large for H2, and little for hydrocarbons (CH4) and noble gases. After being pumped by the NEGP for 72 hours, the pressure in the XHV chamber dropped from 8.34×10-9Pa to 9.12×10-10Pa. The residual gases, such as CO and CO2, possibly originated from the QMS.

引用

页码：54 / 59

页数：5

共 19 条

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