Growth process of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD using nitrogen and helium as a dilution gas

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作者：
Mori, Takanori [1 ]
Sakurai, Takachika [1 ]
Sato, Taiki [1 ]
Shirakura, Akira [1 ]
Suzuki, Tetsuya [1 ]
机构：
[1] Graduate School of Science and Technology, Keio University, Yokohama,223-8522, Japan
来源：
Japanese Journal of Applied Physics | 2016年 / 55卷 / 04期
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摘要：
Helium
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