Thermal stability of amorphous fluoropolymer films

被引：0
|
作者：
Ding, S.J. [1 ]
Wang, P.F. [1 ]
Zhang, J.Y. [1 ]
Zhang, W. [1 ]
Wang, J.T. [1 ]
Zhang, Y.W. [1 ]
Xia, Z.F. [1 ]
机构：
[1] Dept. of Electronic Eng., Fudan Univ., Shanghai 200433, China
来源：
Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research | 2001年 / 15卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
12
引用
收藏
页码：201 / 204
相关论文
共 50 条
  • [1] DEPOSITION OF AMORPHOUS FLUOROPOLYMER THIN-FILMS BY THERMOLYSIS OF TEFLON AMORPHOUS FLUOROPOLYMER
    NASON, TC
    MOORE, JA
    LU, TM
    APPLIED PHYSICS LETTERS, 1992, 60 (15) : 1866 - 1868
  • [2] Optical multilayer films based on an amorphous fluoropolymer
    Chow, Robert
    Loomis, Gary E.
    Ward, Raymond L.
    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1996, 14 (01): : 63 - 68
  • [3] Optical multilayer films based on an amorphous fluoropolymer
    Chow, R
    Loomis, GE
    Ward, RL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (01): : 63 - 68
  • [4] Patterning amorphous fluoropolymer films by reactive ion milling
    M. W. Denhoff
    Mae Gao
    Journal of Electronic Materials, 1997, 26 : 941 - 943
  • [5] Structures and thermal stability of fluorinated amorphous carbon films
    Key Lab. of Wide Band-Gap Semiconductor Materials and Devices, Institute of Microelectronics, Xidian University, Xi'an 710071, China
    Dianzi Qijian, 2006, 2 (304-307):
  • [6] Patterning amorphous fluoropolymer films by reactive ion milling
    Denhoff, MW
    Gao, M
    JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (08) : 941 - 943
  • [7] Porous amorphous fluoropolymer films with ultralow dielectric constant
    Ding, SJ
    Wang, PF
    Zhang, W
    Wang, JT
    Wei, WL
    Zhang, YW
    Xia, ZF
    CHINESE PHYSICS, 2000, 9 (10): : 778 - 782
  • [8] Improvement of thermal stability of amorphous CoFeSiB thin films
    Jimbo, M.
    Fujiwara, Y.
    Shimizu, T.
    JOURNAL OF APPLIED PHYSICS, 2015, 117 (17)
  • [9] Thermal stability of amorphous metal chalcogenide thin films
    Sava, F.
    Simandan, I. D.
    Stavarache, I.
    Porosnicu, C.
    Mihai, C.
    Velea, A.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2021, 559
  • [10] Improvement of thermal stability of amorphous CoFeSiB thin films
    Jimbo, M. (jimbo@daido-it.ac.jp), 1600, American Institute of Physics Inc. (117):
12345