Fabrication of microfluidic chip with two-step using excimer laser ablation micromachining technique and replica molding technology

被引：2
|
作者：
Shen X. [1 ]
Chen T. [1 ]
Wu J. [2 ]
机构：
[1] Institute of Laser Engineering, Beijing University of Technology
[2] Beijing Polystar Digidisc Co., Ltd.
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2011年 / 38卷 / 09期
关键词：
Excimer laser; Laser technique; Microfluidic chip; Micromachining; Replica molding;
D O I：
10.3788/CJL201138.0903004
中图分类号：
学科分类号：
摘要：
We present an effective and low-cost method for fabricating microfluidic chip based on excimer laser direct-writing ablation and replica molding. It is based on a newly excimer laser micromachining technique that can accurately machine microfluidic chip microstructure with smooth surface profile. Microfluidic chips with precise and smooth surface profiles are ablated by direct laser machining on an epoxy glue layer sticking on glass substrates. Laser-machined microfluidic chips are replicated by electroforming to obtain inverse metal molds. Finally, polycarbonate (PC) microfluidic chips are replicated from these metal molds using injection molding method. The relation between the process parameters (the translational speed of working platform and the laser fluence) and the micromachining quality (the depth and surface of the microchannel) is investigated. The profile accuracy and surface roughness of the produced microfluidic chip at each stage are measured and monitored. The average upper surface profile accuracy is better than 2 μm and the average surface roughness is less than 20 nm. Experimental data show the controllability and accuracy of this micromachining process. Experimental investigation is performed on the flow characteristics of water in two different roughness rectangle microchannels. The flow characteristics of water in the microchannels fabricated with the proposed combination method are better than those in the microchannels fabricated with laser direct-writing when the flow velocity is small.
引用
收藏
相关论文
共 17 条
  • [1] Kopp Martin U., De Mello Andrew J., Manz A., Et al., Chemical amplification continuous-flow PCR on a chip, Science, 280, 5366, pp. 1046-1048, (1998)
  • [2] Fang Z., Microfluidic chip development and prospects, University Chemistry, 16, 2, pp. 1-6, (2001)
  • [3] Tein C.-H., Chien Y.-E., Chiu Y., Et al., Microlens array fabricated by excimer laser micromachining with gray-tone photolithography, Jpn. J. Appl. Phys., Part 1, 42, 3, pp. 1280-1283, (2003)
  • [4] Zimmer K., Hirsch D., Bigl F., Excimer laser machining for the fabrication of analogous microstructures, Appl. Surf. Sci., 96-98, pp. 425-429, (1996)
  • [5] Naessens K., Ottevaere H., Daele P.V., Et al., Flexible fabrication of microlenses in polymer layers with excimer laser ablation, Appl. Surf. Sci., 208-209, 1, pp. 159-164, (2003)
  • [6] Qi H., Yao L., Wang T., Et al., Excimer laser micromachining of PMMA based PCR micro-fluidic chip, Microfab. Technol., 1, pp. 16-19, (2006)
  • [7] Naessens K., Ottevaere H., Baets R., Et al., Direct writing of microlenses in polycarbonate with excimer laser ablation, Appl. Opt., 42, 31, pp. 6349-6359, (2003)
  • [8] Qi H., Wang X., Chen T., Et al., Fabrication and application of PMMA continuous-flow PCR microfluidic chip with CO<sub>2</sub> laser direct-writing ablation micromachining technique, Chinese J. Lasers, 36, 5, pp. 1239-1245, (2009)
  • [9] Galantucci L.M., Giusti F., Excimer laser cutting: experimental characterization and 3D numerical modeling for polyester resins, Ann. CIRP, 47, 1, pp. 141-144, (1998)
  • [10] Zimmer K., Braun A., Bigl F., Combination of different processing methods for the fabrication of 3D polymer structures by excimer laser machining, Appl. Surf. Sci., 154-155, pp. 601-604, (2000)
12