Experimental study regarding the surface roughness of circular crystal wafers sliced by a multi-wire saw with reciprocating and rocking functions

被引：0
|
作者：
Lin, Zhishu [1 ,3 ]
Huang, Hui [2 ]
Li, Shengbo [1 ,3 ]
机构：
[1] School of Mechanical and Automotive Engineering, Fujian Province, Xiamen University of Technology, Xiamen,361024, China
[2] Institute of Manufacturing Engineering, Fujian Province, Huaqiao University, Xiamen,361021, China
[3] Fujian Province Key Laboratory of Green Intelligent Cleaning Technology and Equipment, Xiamen,361024, China
来源：
International Journal of Advanced Manufacturing Technology | 1600年 / 135卷 / 3-4期
关键词：
Sapphire;
D O I：
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学科分类号：
摘要：
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页码：1385 / 1396
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