Optical waveguides fabricated from oxidized porous silicon

被引：0
|
作者：
Charrier, J. [1 ]
Gorju, E.L.E. [1 ]
Haji, L. [1 ]
Guendouz, M. [1 ]
机构：
[1] Grp. Microlectron. et Visualisation, Université de Rennes 1, I.U.T. de Lannion, Boîte postale 150, 22302 Lannion Cedex, France
来源：
Journal of Porous Materials | 2000年 / 7卷 / 01期
关键词：
Optical waveguides - Oxidation - Porosity - Refractive index;
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摘要：
Further results on the optical properties of oxidized porous silicon as a function of porosity and oxidation conditions are presented in this paper. The refractive index varies logarithmically with the oxidation time irrespective of the porosity of the sample and the oxidation temperature. Burried waveguides have been realized from as-prepared and oxidized porous silicon. Optical losses of 18 dB cm-1 at λ = 1.3 μm have been obtained after oxidation at 800 °C for 35 min.
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页码：243 / 246
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