Fabrication of aspherical micro-optical elements based on silicon anisotropic etching

被引：0
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作者：
Chen, Sheng-Bin [1 ]
Li, Ji-Sai [1 ]
Zhang, Xin-Yu [1 ]
机构：
[1] Institute of Pattern Recognition and Artificial Intelligence, Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
来源：
Bandaoti Guangdian/Semiconductor Optoelectronics | 2007年 / 28卷 / 02期
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页码：231 / 234
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