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- [3] Mechanisms of concurrent SiO desorption with oxide layer formation at Si(001) surface Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 2008, 164 (03): : 60 - 68
- [8] Surface reaction mechanisms during atomic layer deposition of zirconium oxide using water, ethanol, and water-ethanol mixture as the oxygen sources JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020, 38 (01):