Structrual design of detector for optical elements with large aperture

被引：0
|
作者：
Huang B. [1 ]
Li X.-L. [1 ]
Yang H.-Q. [1 ]
机构：
[1] Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun
来源：
Huang, Bin (huangbin@ciomp.ac.cn) | 1600年 / Chinese Academy of Sciences卷 / 24期
关键词：
ADAMS; Defect detector; Finite Element Analysis(FEA); Inverse kinematics; Modal analysis; Optical inspection;
D O I：
10.3788/OPE.20162413.0259
中图分类号：
学科分类号：
摘要：
In order to meet the requirements for surface defect detection of optical elements with large caliber in optical detection systems, a defect detector with four degrees of freedom was designed. The detector was controlled by four independent drive devices. The matrix transformation of coordinate system was employed to calculate the kinematics of the defect detector, involving the relationship between the trajectory coordinates of objective lens and displacement of actuators and the relationship between each follow-up servos and the active servo. The kinematics results were verified by ADAMS, a virtual prototype simulation software, obtaining the displacement-time curves. Furthermore, the static position deviation of objective lens and cantilever structure of the lens cone were analyzed by ANSYS Workbench. The results indicate that the maximum of static position deviation of lens is 19.82 μm. The deviation can be decreased to less than 1 μm by adjusting 1/36 round of precise pitch of precise angle adjustment, which can satisfy the design indices of ±10 μm. Moreover, the working frequency is far less than the first-order natural frequency of 882.58 Hz, which can avoid the destruction to the whole structure caused by syntony, thus verifying the reliability and safety of the equipment. © 2016, Science Press. All right reserved.
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页码：259 / 266
页数：7
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